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市场调查报告书

半导体工厂的自动化:技术及市场预测

Semiconductor Factory Automation: Technology Issues and Market Forecasts

出版商 Information Network 商品编码 4968
出版日期 内容信息 英文 155 PAGES
商品交期: 最快1-2个工作天内
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半导体工厂的自动化:技术及市场预测 Semiconductor Factory Automation: Technology Issues and Market Forecasts
出版日期: 2018年10月01日 内容信息: 英文 155 PAGES
简介

在尖端科技领域调查公司中具有世界级高度评价的美国调查公司The Information Network,将报告书” Semiconductor Factory Automation: Technology Issues and Market Forecasts”即时(订购当时更新内容)呈现给您。

本报告提供半导体工厂自动化业界分析,主力企业,再加上决定半导体工厂朝自动化方向前进的因素分析。其市场区分为以下各类。

1. 自动运输设备(机器人,电梯,月台等等)
2. 营运商运输(战轨列车,AGV,AS/RS等)
3. 制造执行系统(MES)软件

本报告书内容概述如下。

1. 简介

2. 摘要整理

  • 主要问题要点
  • 市场预测要点

3. 推进力

  • 朝300MM晶圆发展的趋势
  • 开发成本
  • 单一晶圆过程
  • 过程工具的趋势
  • 自动化的趋势
  • 自动晶圆的优点

4. 软件

  • CIM的发展
  • MES
  • 通讯规格
  • SEMATECH CIM framework

5. 硬件设备

  • 自动化的要素
  • 弹性自动化
  • 可靠性
  • 工具的问题与趋势
  • E-manufacturing(产业电子化)

6. 市场分析

  • 市场影响因素
  • 市场预测的前提条件
  • 市场预测(自动运输工具市场,营运商运输市场,MES软件市场)

7. 用户相关问题

  • 关于自动化的当今见解
  • 工厂相关的新范例
  • 开始运作的新工厂
  • 关于ROI的见解
  • 旧范例的八个预兆
  • 新范例的有效利用

本网页内容可能与最新版本有所差异。详细情况请与我们联系。

目录

Clean processing has driven the proliferation of wafer-handling automation within process tools. Wafer-handling robot arms in vacuum and atmospheric tools are standard today. Meanwhile, Moore's Law played the primary role in wafer size increases and the automation that is present outside of the process tools.

This report addresses these technical issues, presenting an analysis of the semiconductor factory automation industry, the key players, and the driving forces directing semiconductor factory automation. Markets are segmented as: 1. Automated transfer tools (robots, elevators, platforms, etc.), 2. Carrier transport (monorail, AGV, AS/RS, etc.), 3. Manufacturing execution systems (MES) software. With the move to 450mm wafers - changes in wafer size, weight, fragility, risk of damage or creation of damaging particles - existing wafer handling robots and the drives, motors, linear components and controls that automate these wafer handling tools will need a new generation of components to satisfy the requirements of 450mm wafer handling. The vacuum and atmospheric robotic market is forecast and market shares of vendors presented.

Table of Contents

Chapter 1 Introduction

Chapter 2 Executive Summary

  • 2.1 Summary of Major Issues
  • 2.2 Summary of Market Forecasts

Chapter 3 Driving Forces

  • 3.1 Introduction
  • 3.2 Trend to 300/450mm Wafers
  • 3.3 Development Costs
  • 3.4 Single-Wafer Processing
  • 3.5 Trends in Processing Tools
  • 3.6 Automation Trends
  • 3.7 Benefits of Automated Wafer Handling

Chapter 4 Software

  • 4.1 Introduction
  • 4.2 The Evolution of CIM
  • 4.3 MES in Industry
    • 4.3.1 MES Functionalities
    • 4.3.2 MES Products
  • 4.4 Communication Standards
  • 4.5 Sematech CIM Framework

Chapter 5 Hardware

  • 5.1 Introduction
  • 5.2 Elements of Automation
    • 5.2.1 Tool Automation
    • 5.2.2 Intrabay Automation
    • 5.2.3 Interbay Automation
    • 5.2.4 Material-Control System
  • 5.3 Flexible Automation
  • 5.4 Reliability
  • 5.5 Tool Issues and Trends
    • 5.5.1 Flexible Tool Interface
    • 5.5.2 Vacuum Robotics
    • 5.5.3 AGV
    • 5.5.4 Robot Control Systems
    • 5.5.5 300-mm Wafer Transport
    • 5.5.6 Mini-Environments and Cleanroom Issues
  • 5.6 E-Manufacturing

Chapter 6 Market Analysis

  • 6.1 Market Forces
  • 6.2 Market Forecast Assumptions
  • 6.3 Market Forecast
    • 6.3.1 Automated Transfer Tool Market
    • 6.3.2 Carrier Transport Market
    • 6.3.3 MES Software Market

Chapter 7 User Issues

  • 7.1 Current Automation Thinking
  • 7.2 The New Factory Paradigm
  • 7.3 The New Factory in Action
  • 7.4 Return on Investment Considerations
  • 7.5 Eight Symptoms of the Old Paradigm
  • 7.6 Putting the New Paradigm to Work

List of Figures

  • 1.1 Advanced CIM System
  • 3.1 Automated Materials Handling System (AMHS) Framework
  • 4.1 Evolution of CIM
  • 4.2 Computer Integrated Fab Environment
  • 4.3 Message Integration in CIM
  • 4.4 Sematech CIM Framework Scope
  • 5.1 Material-Control System
  • 5.2 Traditional and Flexible Automated Material Handling System
  • 5.3 Overhead Monorail Delivery - Cassette in Box, Cassette in SMIF Pod
  • 5.4 Stocker Design and Interfaces
  • 5.5 Layout Of a 45nm 300mm Fab
  • 5.6 Interfaces To Factory Automation Systems
  • 6.1 Semiconductor Equipment Utilization
  • 6.2 Revenue Losses from Wafer Defects
  • 6.3 Market Shares of Atmospheric Robot Suppliers
  • 6.4 Market Shares of Vacuum Robot Suppliers
  • 6.6 Worldwide Market Shares of Carrier Transport Suppliers
  • 6.7 Worldwide Market of Shares MES Software Suppliers

List of Tables

  • 5.1 Evolution Of Factory Metrics
  • 6.1 Three-Year Savings for Automation
  • 6.2 Cost of Alternative Automated Systems
  • 6.3 Three-year Costs for Alternative Automated Systems
  • 6.4 Worldwide Forecast of Automated Transfer Tools
  • 6.5 Bill Of Materials For Atmospheric Automation Tool
  • 6.6 Bill Of Materials For PVD Vacuum Tool
  • 6.7 Process Tool Automation For 300mm Fabs
  • 6.8 Worldwide Forecast of Carrier Transport Market
  • 6.9 300mm Fab Construction Plans
  • 6.10 Worldwide Forecast of MES Software
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