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市场调查报告书

100nm 以下 IC 生产用化学药品与材料

Chemicals and Materials for Sub-0.100nm IC Manufacturing

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100nm 以下 IC 生产用化学药品与材料 Chemicals and Materials for Sub-0.100nm IC Manufacturing
出版日期: 2017年10月01日 内容信息: 英文
简介

本报告针对半导体产业动向、液体、气体药品、溅镀材料,提供相关技术课题、纯度条件、管理法、今后预测、顾客课题等,目录介绍如下。

第1章 介绍

第2章 摘要整理

第3章IC产业动向

  • IC产业发展预测
  • IC制造技术动向

第4章 液体药品

  • 技术课题
    • 酸与溶剤
    • 注册
  • 纯度必要条件
    • 净化方法
    • 微粒子
  • 薬品管理
    • 概要
    • 薬品使用量降低

第5章 气体

  • 技术课题
  • 条件
    • 净化方法
    • 微粒子
    • 摘要
  • 药品管理

第6章 溅镀与蒸镀材料

  • 技术课题
  • 纯度条件

第7章 市场预测

  • 市场影响因素与假设
  • 药品与材料相关预测
    • 药品与材料分类预测
    • 已处理矽单位面积药品使用量
    • 市场占有率

第8章 顾客课题

  • 供应商基准
    • 品质管理统计
    • 分析功能
    • 产品制造/来源
    • 一般的看法
  • 公司内部品质管理与保证
    • 分析工具
    • 测试实施次数
    • 排放瓦斯分析
目录

Chemicals and materials are used in every processing step in the fabrication of silicon and gallium arsenide integrated circuits. Technological advances in Si and GaAs ICs have resulted in more stringent requirements in the purity and quality of processing chemicals and materials for cleaning, etching, and deposition. As linewidths decrease, the level and size of contaminants in both chemicals and the manufacturing cleanroom become increasingly important as it directly impacts device yield.

This report addresses a number of important factors that will impact the consumption of chemicals and materials for manufacturing ICs with feature sizes <100nm: Technological issues and trends; Purity and particulate requirements; Chemical dispensing practices; Acid reprocessing; Strategic considerations for chemical users; Analysis and forecast of the worldwide chemical market; and trends in usage as devices features decrease. Market shares of vendors also presented.

Table of Contents

Chapter 1: Introduction

Chapter 2: Executive Summary

  • 2.1. Key Industry Trends
  • 2.2. Market Outlook
  • 2.3. Supplier Opportunities

Chapter 3: IC Industry Trends

  • 3.1. IC Industry Growth Forecast
  • 3.2. Trends in IC Processing Technology

Chapter 4: Liquid Chemicals

  • 4.1. Technology Issues
    • 4.1.1. Acids and Solvents
    • 4.1.2. Resists
  • 4.2. Purity Requirements
    • 4.2.1. Purification Methods
      • Trends For Purity - Trace Elements
    • 4.2.2. Particulates
      • Effects on Yield
      • Particulate Removal Techniques
      • Particle Monitoring
  • 4.3. Chemical Management
    • 4.3.1. Introduction
    • 4.3.2. Chemical Usage Reduction

Chapter 5: Gases

  • 5.1. Technology Issues
  • 5.2. Requirements
    • 5.2.1. Purification Alternatives
      • Historical Perspective
      • Trends For Purity - Consistency
    • 5.2.2. Particulate Considerations
      • Particle Monitoring
      • Filtration Methods
    • 5.2.3. Summary

Chapter 6: Sputtering and Evaporation Materials

  • 6.1. Technology Issues
  • 6.2. Purity Requirements

Chapter 7: Market Forecast

  • 7.1. Market Driving Forces & Assumptions
  • 7.2. Chemicals and Materials Forecast
    • 7.2.1. Forecast By Chemical and Material
    • 7.2.2. Chemical Use Per Unit Area Of Silicon Processed
    • 7.2.3. Market Shares

Chapter 8: Strategic Customer Issues

  • 8.1. Benchmarking a Vendor
    • 8.1.1. Statistical Quality Control
      • Assay and Related Items
      • Trace Elements
      • Particles
    • 8.1.2. Analytical Capabilities
    • 8.1.3. Product Manufacturing And/Or Sourcing
    • 8.1.4. General Considerations
      • Installation and Retrofitting Costs
  • 8.2. In-House Quality Control And Assurance
    • 8.2.1. Analytical Tools
    • 8.2.2. How Much Testing
    • 8.2.3. Exhaust Gas Analysis

List of Figures

  • 4.1. Relationship Between Device Yield and Particles
  • 4.2. Relationship Between Die Yield and Chip Size
  • 4.3. Chemical Management Services Tasks
  • 6.1. ITRS Roadmap
  • 6.2. Gate-Last Approach
  • 6.3. Gate-First Approach
  • 7.1. Chemical/Semiconductor Revenue Ratio
  • 7.2. Worldwide Resist Market
  • 7.3. Resist/Semiconductor Revenue Ratio
  • 7.4. 2012 Silicon Wafer Market
  • 7.5. 2015 Silicon Wafer Market
  • 7.6. Cost of Chemicals Per Square Inch of Silicon
  • 7.7. Worldwide Market Shares for Gas Suppliers
  • 7.8. Worldwide Market Shares for Liquid Chemical Suppliers
  • 7.9. Worldwide Market Shares for Photoresist Suppliers
  • 7.10. Worldwide Market Shares for Silicon Wafer Companies
  • 7.12. Pricing Trend For Silicon Wafers

List of Tables

  • 4.1. Common Wafer Processing Chemicals
  • 4.2. Photoresist Stripping Solutions
  • 5.1. Gas Control System Issues
  • 5.2. Potential Hazards of Processing Gases
  • 7.1. Worldwide Forecast of Chemicals and Materials for IC Manufacturing
  • 7.2. Worldwide Market Forecast of Si Wafers
  • 7.3. Worldwide Market Forecast of Sputtering Targets
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