Abstract
This study discusses the technology development activities associated with MEMS technology and its commercialization/market potential in the Industrial Automation arena.
Table of Contents
1 EXECUTIVE SUMMARY
- Scope & Methodology
- Overview
- Scope of the Research Service
- Methodology
- Key Research Findings
- Technology Snapshot
- Key Technologies and Innovations
- Analyst Insights
2 MICROMANUFACTURING
- Technology Snapshot
- Overview of Micromanufacturing
- Importance of Micromanufacturing
- Bulk Micromanufacturing
- Overview of Etching
- Isotropic and Anistropic Etching
- Dry and Wet Etching
- Surface Micromachining
- General Description
- Surface Micromachining Process
- The LIGA Process
- General Description
- Electroplating
- The SLIGA Process
3 MEMS TECHNOLOGY AND APPLICATIONS OVERVIEW
- MEMS Senors
- Technology Viewpoint
- Pressure Sensors
- Accelerometers
- Gyroscopes
- Gas Sensors
- Proximity/Position Sensors
- Flow Sensors
- Humidity; Temperature/Thermal Sensors
- Mechanical Stress Sensors
- Acoustic Wave Sensors
- MEMS Actuators
- Technology Viewpoint
- Micromotors
- Micropumps
- Microvalves
- Microturbines
- Micromirrors
- MEMS Actuator Types and Lab-on-a-Chip Systems
4 TECHNOLOGY IMPACT AND ADOPTION FACTOR ANALYSIS
- Technology Impact Analysis
- MEMS versus Conventional Technology
- Technology Roadmap
- Technology Features; Benefits; and Trends
- Technology Adoption Factor Analysis
- Analysis of Technology Drivers
- Analysis of Technology Restraints
5 GLOBAL TECHNOLOGY DEVELOPMENTS
- Innovations in MEMS Sensors--Global Developments
- Dissolved Wafer Process for Manufacture of MEMS Pressure Sensors--Integrated Sensing Systems Inc.--USA
- Nonsilicon-Based Process for MEMS Tactile Sensors--Thailand
- Vibration Power Harvesting--USA
- iMEMS and iSensor Technologies--Analog Devices--USA
- MEMS-Based Capacitive Sensors for RF Communication-- University of Twente--Netherlands
- Optic Fibers MEMS Pressure sensors--Nanjing Normal University--China
- MEMS Pressure Sensors for Harsh Environments--Iowa State University--USA
- Digital Pressure Sensor Technology--Switzerland
- System-on-Chip for Wireless Sensor Networks--Dust Networks Inc.--USA
- Passive Wireless Sensors--Georgia Institute of Technology--USA
- Innovations in MEMS Actuators--Global Developments
- Integrated System for Rotating Microengines--TEGAM Inc.--USA
- MEMS Silicon Clocks--SiTime Inc.--USA
- MEMS-Based Industrial Equipment Monitoring--Germany
- MEMS Gas Turbine Engine--USA
- Microchip for MEMS Flow Control System--Microstaq Inc.--USA
- Combustion Driven Fluidic Actuator--Georgia Institute of Technology--USA
- Microvision Inc.--USA
- Digital Microfluidics--University of Washington
- Micromachined Vibratory Gyroscopes--University of Berkley
6 INNOVATIVE DEVELOPMENTS IN MICROMACHINE TOOLS AND PROCESSES
- University Research--World
- 1st Generation Micromilling--Georgia Institute of Technology--USA
- 3-Axis MesoMill--MIT--USA
- Industrial Development and Systems Integration Applications--ITRI--Taiwan
- Microforming--Extrusion of Micropins--Northwestern University--Illinois
- Corporate Research--USA
- 4-Axis Micromill--Atometric Inc.
- Nanowires as Replacements for Lithography--Hewlett Packard
- 3-Axis Micromill--Micro Machines International Inc.
7 FUNDING ANALYSIS AND WORLD-WIDE INNOVATION ASSESSMENT
- Venture Capital; Public Sector and Company Funding; and SWOT Analysis
- Venture Capital Funding
- Public Sector Funding
- Company Funding and SWOT Analysis
- World-Wide Innovation Assessment
- USA/Latin America
- Canada
- Europe
- Asia/Pacific
8 PATENTS; PATENT ANALYSIS AND KEY CONTACTS
- Patent Analysis
- Recent Patents
- Patent Analysis--Worldwide
- Database of Key Participants
- Research Contacts
- Corporate Contacts
9 DECISION SUPPORT DATABASE
- Database Tables
- Global Semiconductor and Semiconductor Equipment Market--World (1999 to 2006)
- Machine Tool Production--World (1999 to 2006)
- PCB Sales--World (1999-2006)
- Consumer Electronics Contribution to Electronic Industry--World (1999 to 2006)
- Control and Instrumentation Contribution to the Electronics Industry--World (1999 to 2006)
